Introduction：

The UPSSAir air flotation motion platform system not only selects high-performance components such as grating rulers and drivers, but also is the fruit of a systematic engineering project by the Sukesi team, which includes the design of high dynamic performance structures and air flotation bearing components, the development of low-latency real-time controllers, and the optimization and implementation of servo control algorithms. Its positioning accuracy, repeatability error and dynamic stability can meet the system requirements of the 28nm advanced process.

UPSSAir also offers a complete set of vibration damping system solutions. Low natural frequency shock absorbers, low residual reaction force balance systems, combined with optimized control algorithms, provide a good working environment for the entire machine system. The active leveling system further improves the motion accuracy of the moving table. The automatic centering function enhances the safety of loading and unloading.

UPSSAir adopts the UPSSsMA-RT high-performance control system, including hardware, firmware and software systems developed for high-end applications. Not only has it achieved real-time multi-axis linkage control of UPSSAir, but it can also realize real-time synchronous control of multiple subsystems based on the customer's overall machine design, perfectly meeting the dynamic and static performance requirements of the moving table for the entire machine.

Specification：