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The UPS Glider mechanical motion platform system

Key Feature:
High precision | Sub-micron-level accuracy and repeatability, nano-level stability.
High yield design | High acceleration, low tuning time.
Good thermal stability | Through excellent structural thermal design, the dynamic characteristics and accuracy remain almost unchanged while ensuring high yield.


Application Field:
• Semiconductor front-end measurement equipment
• Film thickness measurement
• Advanced packaging of semiconductors

Product Detail

Introduction:

The UPSSGlider mechanical motion platform system adopts a mechanical guide rail structure and has undergone finite element analysis to achieve extreme weight reduction and ensure good structural rigidity. This enables the moving table to achieve an extremely high structural natural frequency. In combination with the low-latency and high-bandwidth control system independently developed by Sukexi and advanced control algorithms, outstanding dynamic performance has been achieved.

UPSSGlider also adopts a self-developed active shock absorption system, which can efficiently isolate ground vibrations and effectively eliminate the excitation generated during high-speed movement, providing a stable working environment for the entire system. Combining a high-performance drive system and feedback system, the motion table has achieved nanoscale stability.


Specification:

Indicator projectUnitUPssGlider 100UPssGlider 200
Strokemm400*400400*400
Rated Loadkg1010
Max Loadkg3030
Max Speedmm/s10002000
Max AccelerationG12.5
Positional Accuracyum±1±0.5
Bidirectional Repeatabilityum±0.5±0.2
Positional Stabilitynm±20±2
Motion Tuning*ms180**90**

*It adopts the self-developed control algorithm and active shock absorption system of SIOUX

**25mm step @ ± 100nm error window

Industry Application