The UPSSAir air flotation motion platform system not only selects high-performance components such as grating rulers and drivers, but also features a high dynamic performance structure developed by the Sukesi team The crystallization of systematic engineering, including the design of air flotation bearing assemblies, the development of low-latency real-time controllers, and the optimization and implementation of servo control algorithms. Its positioning accuracy The repeatability error and dynamic stability can meet the system requirements of the 28 nm advanced process.
The UPSSGlider mechanical motion platform system adopts a mechanical guide rail structure and has undergone finite element analysis to achieve extreme weight reduction and ensure good structural rigidity. This enables the moving table to achieve an extremely high structural natural frequency. In combination with the low-latency and high-bandwidth control system and advanced control computer independently developed by Sukexi The method has achieved outstanding dynamic performance.
The UPSSHiRes high-precision micro-motion platform system adopts a direct drive mechanism and flexible mechanical structure design. Its high-precision grating feedback control system can achieve small-angle rotation and nanoscale height control.
The UPSSGlider mechanical motion platform system adopts a mechanical guide rail structure and has undergone finite element analysis to achieve extreme weight reduction and ensure good structural rigidity. This enables the moving table to achieve an extremely high structural natural frequency. In combination with the low-latency and high-bandwidth control system independently developed by Sukexi and advanced control algorithms, outstanding dynamic performance has been achieved.
The ATOMFocusTM high-precision autofocus sensor series adopts the coaxial optical measurement principle to achieve ultra-high-speed and high-precision measurement of sample surface height. It can be applied to equipment such as semiconductor front-end quantity detection, general semiconductor optical detection, and laser processing.
The UPSSsMA-RT Controller adopts a high-performance multi-core processor, SoC, high-speed uPHO optical fiber bus and high-performance position signal subdivision module to achieve at least 16-axis high-performance closed-loop control and nanosecond-level motion synchronous triggering function, with a control cycle better than 40 KHz. The UPSSsMA-RT Algorithm is a control algorithm developed entirely based on the model. By using the SAXCS motion control R&D platform independently developed by Sukexi, highly reliable control algorithms can be rapidly developed and iterated, effectively shortening the product development cycle for customers.
Since its establishment, Jiangsu Jicui SIOUX has, based on years of experience in serving the world's leading semiconductor equipment enterprises, possesses a strong cross-disciplinary R&D integration capability covering mechatronics, optics, algorithms and software. It has accumulated rich experience in complex and precise system-level design, precision mechanical design, precision optical design, high-frequency and high-speed board card design, and motion control algorithm development.
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