Introduction：

The UPSSHiRes high-precision micro-motion platform system adopts a direct drive mechanism and flexible mechanical structure design. Its high-precision grating feedback control system can achieve small-angle rotation and nanoscale height control.

UPSSHiRes is compatible with UPSSAir/UPSSGlider, forming a multi-degree-of-freedom motion system. Driven by the UPSSsMA-RT high-performance control system, we provide customers with a complete set of application solutions, which can achieve the calibration of wafer rotation errors and real-time focusing during the movement process.

The UPSSHiRes rotary table mover adopts vacuum adsorption after the movement is completed, enhancing the connection rigidity of the UPSSHiRes during the movement, completely eliminating the jitter introduced by the Rz axis, and greatly improving the overall dynamic performance of the SIOUXUPSS motion system.

Specification：