Optical focus sensor-Jiangsu Jicui SIOUX Technology Co., LTD

Key Features:

• The maximum surface spot of the object can cover up to 1/2FOV, ensuring stable focusing within the field of view

• Wide-spectrum light source, with higher adaptability to the tested samples

• High precision, wide range, and high adaptability

• Optional installation parts for BS/DM in the customer's optical path coupling process are available

• It is equipped with a pup-surface/object-surface coupling observation fixture to achieve high-precision coupling with the customer's optical path

• Perfectly compatible with high-magnification, large NA optical systems (compatible with objective lenses with NA=0.95)

• The output frequency can reach up to 20 kHz, with a signal delay of microsecond level

Application Field:

• Semiconductor front-end quantity detection

• Pan-semiconductor optical inspection

• Optical processing

Model	AUTOMFouse^TM 100W
Light Source Type	LED
Wave Length*(nm)	630
Spectral Width(nm)	±15
Internal update Frequency(kHz)	500
Output Frequency(kHz)	0~20 Configurable
Light spot on the object surface**	Circle or Long Line
Adapt to the diameter of the objective lens pupil(mm)	7.2
Sample reflectance(%)	1%-99%，typical value 30%
Static repeatability***(DOF)	Than ±1/8
Measuring head size(mm)	400350150
Measuring head weight(kg)	10
Working distance****(mm)	184±4
Controller size(mm)	220 * 160 * 40
* The wavelength can be customized and configured The spot size and the range of the object surface can be customized * DOF=depth offocus，Refers to the depth of field of the objective lens **** The distance between the light outlet of the sensor and the flange surface of the objective lens
Linearity range(um)	+15 @ 50X/0.9
Capture range(μm)	+20 @ 50X/0.9